Leak Rate Units and Conversion Factors
Use this table to convert between commonly used Leak Rate units.
| Pa m3/s | mbar l/s | Torr l/s | atm cm3/s | μl/s | scc/m | sl/m | Mol/s@0°C | |
| Pa m3/s | 1 | 10 | 7.5 | 9.87 | 7.5·103 | 592 | 0.592 | 4.41·10-4 |
| mbar l/s | 0.1 | 1 | 0.75 | 0.987 | 750 | 59.2 | 5.92·10-2 | 4.41·10-4 |
| Torr l/s | 0.133 | 1.33 | 1 | 1.32 | 1000 | 78.9 | 7.89·10-2 | 5.85·10-4 |
| atm cm3/s | 0.101 | 1.01 | 0.76 | 1 | 760 | 59.8 | 5.98·10-2 | 4.45·10-5 |
| μl/s | 1.33·10-4 | 1.33·10-3 | 10-3 | 1.32·10-3 | 1 | 7.89·10-2 | 7.89·10-5 | 5.86·10-8 |
| sccm | 1.69·10-3 | 1.69·10-2 | 1.27·10-2 | 1.67·10-2 | 12.7 | 1 | 10-3 | 7.45·10-7 |
| slm | 1.69 | 16.9 | 12.7 | 16.7 | 1.27·104 | 1000 | 1 | 7.45·10-4 |
| Mol/s@0°C | 2.27·103 | 2.27·104 | 1.7·104 | 2.24·104 | 1.7·107 | 1.34·103 | 1.34·103 | 1 |
The information is provided to assist the user in specification preparations and comparisons. Please contact VTI with any questions or requirements not covered or answered above.
